Semiconductors

High-Precision Control. Featuring high-resolution A/D converters for optimal current control and micron-level positioning accuracy, our servo drives offer exceptional servo and PWM performance with high-bandwidth nested loops and biquad filters for notch or low pass applications. These features ensure the precise control essential for semiconductor manufacturing processes.

Compact Design. We offer space-efficient solutions for installations where real estate is at a premium. Our drives can be mounted on panels or PCBs, offering flexibility in integration with existing semiconductor equipment.

Advanced Safety Features. The built-in Safe Torque Off (STO) capability eliminates expensive contactors and complex wiring, facilitating system conformance to SIL 3 (IEC 61800-5-2) and Category 3 PL d (ISO 13849-1).

Field Oriented Control. Optimal orientation of the magnetic field ensures motors run faster and cooler, maximizing efficiency in continuous operation environments common in semiconductor fabs.

Robust Construction. EMI shielding and PE grounding protect against electromagnetic interference in sensitive environments. Ruggedized versions are available for applications requiring extreme reliability.

Network Integration. Our drives seamlessly integrate with existing systems via industry-leading protocols like EtherCAT and CANopen, ensuring the real-time control and monitoring crucial for today’s Industry 4.0 manufacturing environments.

High-Resolution Feedback. Supporting a wide array of protocols including BiSS, SSI, and EnDat, our drives ensure the sub-micron precision required for semiconductor processes. Dual-encoder feedback eliminates mechanical backlash by closing the loop directly on the load for maximum positional accuracy.